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Microelectromechanical systems

Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micromechatronics and microsystems constitute the technology of microscopic devices, particularly those with moving parts. They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan and microsystem technology (MST) in Europe.

Metrics Summary

Total Publications
Lifetime
68,517
Prior Five Years
15,760
Total Citations
Lifetime
577,134
Prior Five Years
72,466
Total Scholars
Lifetime
79,646
Prior Five Years
60,006

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Publications and Citation History

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Highly Ranked Scholars™

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Lifetime