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Microfabrication

Microfabrication is a technique that use semiconductor manufacturing processes such as ion etching, diffusion, oxidation, sputtering etc. in combination with specialized micromachining techniques. This machining occurs in the range of 1-100 micrometers in size, where both the mechanical parts and the electronics that control them are built in the same piece of silicon. MEMS Fabrication consists in the application of the following steps, normally several times during the manufacturing. The process starts with a polished silicon – the substrate wafer that undergoes these steps such as Thin film growth or Deposition, Doping, Lithography and etching and Micromachining.

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5,971
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Prior Five Years
6,865

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