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Chemical vapor deposition

Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films.

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Total Publications
Lifetime
31,275
Prior Five Years
3,813
Total Citations
Lifetime
636,197
Prior Five Years
36,714
Total Scholars
Lifetime
51,265
Prior Five Years
35,018

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