Plasma processing

Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.

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Metrics Summary

Total Publications

Lifetime

7,927

Prior Five Years

1,438

Total Citations

Lifetime

115,203

Prior Five Years

7,935

Total Scholars

Lifetime

11,412

Prior Five Years

8,108

Global (Worldwide)

Academic Institutions Lifetime		Academic Institutions Prior Five Years		Non-academic Institutions Lifetime
#1	University of Minnesota, Twin Cities United States	#1	Nagoya University Japan	#1	Tokyo Electron Limited Japan
#2	University of Sherbrooke Canada	#2	Maulana Azad National Institute of Technology India	#2	Lam Research Corporation United States
#3	Tohoku University Japan	#3	University of Massachusetts Lowell United States	#3	Applied Materials, Inc. United States
#4	University of Tokyo Japan	#4	Northwest A&F University China	#4	Panasonic Corporation Japan
#5	University of Michigan United States	#5	Federal University of Ceará Brazil	#5	Tesla, Inc. United States
#6	Nagoya University Japan	#6	Comenius University in Bratislava Slovakia	#7	FEI Company United States
#7	University of Limoges France	#7	University of Montreal Canada	#8	Academy of Athens Greece
#8	Technical University of Munich Germany		Show More	#9	Hitachi, Ltd. Japan
#9	University of Toronto Canada			#10	Semicondutor Energy Laboratory Co., Ltd.
#10	University of California, Berkeley United States			#11	National Centre of Scientific Research Demokritos Greece
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National Institutional Rankings

Lifetime

Prior Five Years

Evaluation Period:

Lifetime