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Alek Chi-Heng Chen

ScholarGPS® ID: 88521026815287

Affiliation

ASML Holding N.V., Veldhoven, Netherlands

Affiliation History

Top Specialties

Manufacturing

Metrics Summary

Publication Count

4

Predicted Citations

9

Predicted h-index

1

Ranking

Publications and Citation History

Publications based on Top Specialties

Types of Publication

Publications
Books
Patents
NIH/NSF

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Method for calibrating a manufacturing process model (patent) Tsai, Kuen-Yu \| Chen, Alek Chi-Heng \| Li, Jia-Han Patent Number: 9541500 (2017) Cite \| Source
Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program (patent) Chiou, Tsann-Bim \| Dusa, Mircea \| Chen, Alek Chi-Heng Patent Number: 8945800 (2015) Cited by (1) \| Cite \| Source
Substrate, method of exposing a substrate, machine readable medium (patent) Chen, Alek Chi-Heng Patent Number: 7713682 (2010) Cite \| Source
Substrate, method of exposing a substrate, machine readable medium (patent) Chen, Alek Chi-Heng Patent Number: 7582413 (2009) Cited by (5) \| Cite \| Source