Che-Cheng Chang

ScholarGPS® ID: 40335141653195

Affiliation
Taiwan Semiconductor Manufacturing Company Limited, Hsinchu Science Park, Taiwan
Affiliation History

Field
Engineering and Computer Science
Discipline
Electrical and Computer Engineering
Top Specialties
Semiconductor | Semiconductor Device | Manufacturing | Dielectric | Control Theory | Metal Gate | Capacitor | VLSI Technology | CMOS | Integrated Circuit | Process Control | Lithography
Metrics Summary
Publication Count
367
Predicted Citations
1,357
Predicted h-index
16
Ranking

Publications and Citation History

Publications based on Top Specialties

Types of Publication

  • Publications
  • Books
  • Patents
  • NIH/NSF
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Semiconductor device with a metal gate stack having tapered sidewalls (patent)
Chang, Che-Cheng | Chen, Yi-Jen | Chen, Chang-Yin | Chang, Yung Jung
Patent Number: 10879372 (2020)
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Semiconductor structure and manufacturing method thereof (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10879364 (2020)
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Semiconductor device (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10872968 (2020)
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Method of forming semiconductor structure (patent)
Chen, Chang-Yin | Chang, Che-Cheng | Lin, Chih-Han
Patent Number: 10872965 (2020)
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Semiconductor device (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10872890 (2020)
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Semiconductor structure with tapered conductor (patent)
Chen, Wei Ting | Chang, Che-Cheng | Lu, Chen-Hsiang | Liu, Yu-Cheng
Patent Number: 10867921 (2020)
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Semiconductor device and manufacturing method thereof (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10868189 (2020)
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Semiconductor device and method (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10868188 (2020)
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Fin-type field effect transistor structure and manufacturing method thereof (patent)
Chang, Che-Cheng | Lin, Chih-Han
Patent Number: 10868179 (2020)
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Semiconductor structure and manufacturing method thereof (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10868002 (2020)
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Method and structure for FinFET isolation (patent)
Chang, Che-Cheng | Lin, Chih-Han | Lin, Jr-Jung
Patent Number: 10867865 (2020)
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Metal gate formation through etch back process (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10868138 (2020)
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Semiconductor device and manufacturing method thereof (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10868012 (2020)
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High-K film apparatus and method (patent)
Chang, Che-Cheng | Chen, Yi-Ren | Chen, Chang-Yin | Chen, Yi-Jen | Zhu, Ming | Chang, Yung-Jung | Chuang, Harry-Hak-Lay
Patent Number: 10861954 (2020)
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FinFET isolation structure (patent)
Chang, Che-Cheng | Lin, Chih-Han | Tseng, Horng-Huei
Patent Number: 10861977 (2020)
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Via structure and methods thereof (patent)
Chang, Che-Cheng | Lin, Chih-Han
Patent Number: 10854542 (2020)
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Method of forming trenches (patent)
Chang, Che-Cheng | Lin, Chih-Han
Patent Number: 10854507 (2020)
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Removing polymer through treatment (patent)
Chen, Hung-Hao | Chang, Che-Cheng | Chen, Wen-Tung | Liu, Yu-Cheng | Tseng, Horng-Huei
Patent Number: 10854505 (2020)
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Semiconductor structure and manufacturing method thereof (patent)
Chang, Che-Cheng | Chen, Chang-Yin | Lin, Jr-Jung | Lin, Chih-Han | Chang, Yung Jung
Patent Number: 10854504 (2020)
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Semiconductor device (patent)
Chang, Che-Cheng | Lin, Chih-Han
Patent Number: 10840379 (2020)
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